High-Resolution Observation Of Cathode Spots In A Magnetically Steered Vacuum Arc Plasma Source

The properties of cathode spots in a magnetically steered vacuum arc plasma source were investigated. The cathode spots were observed with a long-distance microscope coupled to a streak camera, where the entrance slit of the camera was aligned with one of the linear sections of the steered arc source. This is a key feature that allows the observation of spots as they appear along the erosion racetrack. The trends of spot motion and patterns in the emitted light were observed with different sweep times. The streak images were analysed by fast Fourier transformation to check for the presence or absence of characteristic features like characteristic spot lifetimes, since their existence remains a disputed issue. We found that the power spectrum of the arc spot fluctuations does not show any specific frequencies or related times, rather, the spot fluctuations have a broad spectrum following a power law (spectral power density versus frequency), which is indicative for the fractal (self-similar) nature of spot processes. Moreover, we show that-at about 300 MHz under our conditions-we reach the ultimate temporal resolution limit of the method, which is associated with the finite lifetime of excited atomic and ion states. This is a fundamental limit given by the physics of atoms and ions, not a measurement flaw. The temporal resolution limit of about 3 ns also implies a spatial resolution limit of order of a few mu m given that radiating species move laterally to the observation direction with at least 10(3) m s(-1).