Nanostructure optimization of Zr-W-Ti metallic glass thin films via multitarget co-sputtering with oblique angle deposition approach

Rattanachai Kowong,Somyod Denchitcharoen,Tossaporn Lertvanithphol,Narit Triamnak,Chanunthorn Chananonnawathorn,Kata Jaruwongrungsee,Annop Klamchuen,Pennapa Muthitamongkol,Wuttichai Phae-Ngam,Hideki Nakajima,Prayoon Songsiriritthigul,Mati Horprathum

Journal of Alloys and Compounds（2021）

Cited 7|Views4

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Abstract

•The multitarget co-sputtering with oblique angle deposition demonstrates fabricated Zr-W-Ti NMGs thin films.•The substrate angle crucial parameter for controlled nanomorphology.•Chemical composition depends on the substrate angle.•All prepared Zr-W-Ti NMGs thin films were X-ray amorphous.

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Key words

Zr-W-Ti,Nanostructured metallic glasses,Multitarget co-sputtering,Oblique angle deposition,Substrate angle

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