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Reactive Plasma Cleaning and Restoration of Transition Metal Dichalcogenide Monolayers

Daniil Marinov,Jean-François de Marneffe,Quentin Smets,Goutham Arutchelvan,Kristof M. Bal,Ekaterina Voronina,Tatyana Rakhimova,Yuri Mankelevich,Salim El Kazzi,Ankit Nalin Mehta,Pieter-Jan Wyndaele,Markus Hartmut Heyne, Jianran Zhang, Patrick C. With,Sreetama Banerjee,Erik C. Neyts,Inge Asselberghs,Dennis Lin,Stefan De Gendt

npj 2D materials and applications（2021）

Cited 33|Views56
Key words
Electronic devices,Materials for devices,Surface chemistry,Materials Science,general,Nanotechnology,Surfaces and Interfaces,Thin Films
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