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Single Ion Implantation of Bismuth

Nathan Cassidy,Paul Blenkinsopp,Ian Brown,Richard J. Curry,B. N. Murdin,Roger Webb,David Cox

physica status solidi (a)（2020）

Cited 17|Views0
Key words
focused ion beams,ion implantation,KeV single ion detection,quantum technologies,semiconductor doping,single ion implantation
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