Thermal Stability of the Structure and Optical Properties of Nanostructured TIO 2 Films

The structure and optical properties of titanium dioxide films have been studied during annealing from 100 to 400°C. The films were obtained by ion-plasma high-frequency magnetron sputtering of polycrystalline rutile target in an argon atmosphere. It was shown that as-prepared TiO 2 films are nanostructured with ~8 nm rutile crystallites and ~3.3 Å interplanar distances and contain a small fraction of anatase. The optical band gap of the films is 3.01 eV, and the refractive index under normal conditions is 2.25. The film annealing at tamperatures from 100 to 400°C does not practically change their structure, optical band gap, and refractive index under normal conditions, i.e., the obtained nanostructured TiO 2 films are thermally stable.