Stabilization Mechanism of Miniature Extrinsic Fabry-Perot Sensors Based on Micromachined Diaphragm

Fuyin Wang,Shuidong Xiong,Hong Luo,Qiong Yao,Zhengzheng Shao

9TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES OPTOELECTRONIC MATERIALS AND DEVICES FOR SENSING AND IMAGING（2019）

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关键词

Optical fiber sensor,micromachining,Fabry-Perot,workpoint control,diaphragm,stabilization

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