Epitaxial Growth of Κ‐(alxga1−x)2o3 Layers and Superlattice Heterostructures Up to X = 0.48 on Highly Conductive Al‐Doped ZnO Thin‐Film Templates by Pulsed Laser Deposition
PHYSICA STATUS SOLIDI B-BASIC SOLID STATE PHYSICS(2021)
Key words
(AlxGa1-x)(2)O-3,kappa-Ga2O3,superlattices
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