Small-Aperture Stacked-Array Deformable Mirror Made Of The Piezoceramic Combs

Stacked-array deformable mirror is one of the most popular tools for correction of wavefront aberrations. We manufactured the stacked-array deformable mirror with small diameter by using piezoceramic combs with few actuators on them. In this case the aperture of mirror will be equal to 30 mm. The stroke of such mirror would be about 5 microns. The thickness of the mirror substrate is 1 mm. Developed deformable mirrors will be suitable for fast adaptive optical systems for optical radiation transferring through turbulent atmosphere tasks.