红外宽波段亚波长金属线栅偏振元件的研制
CHINESE JOURNAL OF LASERS-ZHONGGUO JIGUANG（2021）
Abstract
基于亚波长结构对光场的调控作用,研制了单层金属线栅偏振元件.利用等效介质和严格耦合波分析(RCWA)理论确定了结构参数,使用有限时域差分(FDTD)法优化设计了 Si基底Al金属线栅结构,并通过多层减反射膜与金属线栅结构的匹配,降低了基底剩余反射率,提高了横磁(TM)波透过率.采用间歇镀Al法减少了辐射温度导致的胶栅形变,制备了具有高偏振性能的亚波长元件.经测试,所制备的线栅偏振元件在中波红外3～5 um波段的TM波透过率为89.1％,消光比为21.9 dB.
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Key words
thin films, antireflection film, metal Al, intermittent coating, sub-wavelength, high polarization performance
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