Residual and Intentional N-Type Doping of ZnO Thin Films Grown by Metal-Organic Vapor Phase Epitaxy on Sapphire and ZnO Substrates
Journal of Applied Physics（2014）
关键词
biexcitons,diffusion,doping profiles,elemental semiconductors,II-VI semiconductors,MOCVD,photoluminescence,secondary ion mass spectra,semiconductor doping,semiconductor epitaxial layers,semiconductor growth,silicon,solubility,vapour phase epitaxial growth,wide band gap semiconductors,zinc compounds
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