Semi-transparent 3D microelectrodes buried in fused silica for photonics applications

We report the realization of semi-transparent 3D microelectrodes fully embedded in a fused silica substrate by a combination of femtosecond laser microfabrication and inkjet printing. We also demonstrate the application of such electrodes in a proof-of-concept lab-on-chip device configuration, which acts as a liquid crystal molecular polarization rotator using on-chip electric fields. This work constitutes a first of its kind synergy between two widely used microfabrication techniques, femtosecond laser and inkjet, demonstrating a very efficient integration of optical, electrical and microfluidic components in a unique platform and thus enabling fast prototyping of 3D structured electro-optic lab-on-chips. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement