1×256 Multi-Layer, Low-Loss, Si3N4 Waveguide Optical Phased Arrays with 0.050° Instantaneous-Field-of-view

Chuan Qin,Kuanping Shang,Shaoqi Feng,Gengchen Liu,Guangyao Liu,Shibnath Pathak,S. J. Ben Yoo

2017 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO)（2017）

Cited 8|Views1

Key words

mode size,excess loss,far field pattern,beam width,multilayer low-loss Si3N4 waveguide optical phased arrays,instantaneous-field-of-view,8-stage multimode interferometer tree,size 4.5 mum,loss 3.0 dB,Si3N4

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