Silicon Nanotexture Surface Area Mapping Using Ultraviolet Reflectance

Giuseppe Scardera,David N. R. Payne,Muhammad Umair Khan,Yu Zhang,Anastasia Soeriyadi,Shuai Zou,Daqi Zhang,Rasmus Schmidt Davidsen,Ole Hansen,Bram Hoex,Malcolm David Abbott

IEEE JOURNAL OF PHOTOVOLTAICS（2021）

引用 5|浏览21

关键词

Silicon,Monitoring,Correlation,Etching,Temperature measurement,Surface texture,Semiconductor device modeling,Black silicon (B-Si),silicon nanotexture,spatial mapping,surface area,ultraviolet (UV) reflectance

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