Micro-Scanning Error Correction Technique For An Optical Micro-Scanning Thermal Microscope Imaging System

With optical micro-scanning technology, the spatial resolution of the thermal microscope imaging system can be increased without reducing the size of the detector unit or increasing the detector dimensions. Due to optical micro-scanning error, the four low-resolution images collected by micro-scanning thermal microscope imaging system are not standard down-sampled images. The reconstructed image quality is degraded by the direct image interpolation with error, which influences the performance of the system. Therefore, the technique to reduce the system micro-scanning error need to be studied. Based on micro-scanning technology and combined with new edge directed interpolation(NEDI) algorithm, an error correction technique for the micro-scanning instrument is proposed. Simulations and experiments show that the proposed technique can reduce the optical micro-scanning error, improve the imaging effect of the system and improve the systems spatial resolution. It can be applied to other electro-optical imaging systems to improve their resolution.