Optimal Design For Parameters Of Structure And Controller For Rigid-Flexible Coupling Motion Stage

With the development of electronic information industry, both the precision and speed of motion stage are required to be improved more quickly. However, the friction is an important and uncertain factor that restricts the precision of motion stage. In order to achieve long stroke and high precision of the stage, this paper comprehensively optimize the structure and controller parameters of the rigid-flexible coupling motion stage. The nonlinearity and uncertainty parts of the stiffness and damping are estimated and compensated by the extended state observer (ESO) in the frame of active disturbance rejection control (ADRC). Then, the parameters of the mechanical structure and controller are optimized comprehensively to minimize the maximum tracking error. In order to verify the effectiveness of this method, it has been compared with the traditional parameter serial optimal design method in simulation. The results show that this method can improve the performance of the rigid-flexible coupling motion stage, and thereof providing an efficient optimal design method for such a stage.