Utilization of Metal-Organic Frameworks for the Management of Gases Used in Ion Implantation

Metal-Organic Frameworks (MOFs) are porous extended crystalline structures comprised of organic ligands and metal units. By changing the identity of the organic ligand and metal unit utilized in the MOF synthesis, the structure, surface area, pore size, and reactivity of the MOF can be modulated. This structural flexibility means that MOFs can potentially be used in a wide range of storage, separation, and catalytic applications. There is a high level of interest in the storage, delivery, capture, and purification of ultra high-purity hazardous gases used in electronics manufacturing (electronic gases). This paper will discuss the use of MOFs as an ideal platform for product and process innovation in the electronic gas sector.