0.9 Mu M Pitch Pixel Cmos Image Sensor Design Methodology

Kazuichiroh Itonaga, Kyohei Mizuta, Toyotaka Kataoka, Masashi Yanagita, Shintaro Yamauchi, Harumi Ikeda,Tsutomu Haruta,Shizunori Matsumoto, Masanori Harasawa,Takeshi Matsuda,Akira Matsumoto, Ikue Mizuno, Takatoshi Kameshima, Iwao Sugiura,Taku Umebayashi, Keiichi Ohno,Teruo Hirayama

2009 IEEE INTERNATIONAL ELECTRON DEVICES MEETING（2009）

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摘要

We demonstrate the first ever 0.91 mu m pitch pixel CMOS image sensor(CIS), and reveal the problems that are likely to be encountered in future device structures. We have developed a set of guidelines for the design of high quantum efficiency(QE) CISs, and verified their validity by comparing the image quality of 0.9, 1.12, 1.4 and 1.75 mu m CISs. Furthermore, we propose a simple methodology to optimize more complicated submicron pitch CIS structures.

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