Free-Space Permittivity Measurement For Inhomogeneous Psv-Coated Si-Wafer At Frequencies From 75 Ghz To 325 Ghz

A method to extract dielectric property of inhomogeneous PSV (Passivation)-coated Si-wafer is presented at broadband frequencies from 75 GHz to 325 GHz. Free-space measurement using continuous wave (CW) system is carried out. Numerical iterative algorithm is employed to extract permittivity from complex scattering parameters. Due to scarcity of related previous studies beyond 100 GHz, the discussions on parameters that may affect the results are also described in detail. The calculated permittivity based on the proposed method highly correlates with the analytical values.