A Self-Clocked Asic Interface For Mems Gyroscope With 1m Degrees/S/Root Hz Noise Floor

A. Elsayed, A. Elshennawy,A. Elmallah,A. Shaban, B. George, M. Elmala,A. Ismail,A. Wassal,M. Sakr, A. Mokhtar,M. Hafez, A. Hamed, M. Saeed, M. Samir, M. Hammad, M. Elkhouly, A. Kamal, M. Rabieah, A. Elghufaili, S. Shaibani, I. Hakami, T. Alanazi

2011 IEEE CUSTOM INTEGRATED CIRCUITS CONFERENCE (CICC)（2011）

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Abstract

An interface for MEMS gyroscope is implemented in 0.18 mu m HVCMOS technology, and achieves a low noise floor of 1m degrees/sec/root Hz over 200Hz BW. Electromechanical Sigma Delta forcefeed-back and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.

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Key words

Sigma delta modulation, Force feedback, Self-clocking, MEMS, Coriolis force

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