A Self-Clocked Asic Interface For Mems Gyroscope With 1m Degrees/S/Root Hz Noise Floor
2011 IEEE CUSTOM INTEGRATED CIRCUITS CONFERENCE (CICC)(2011)
Abstract
An interface for MEMS gyroscope is implemented in 0.18 mu m HVCMOS technology, and achieves a low noise floor of 1m degrees/sec/root Hz over 200Hz BW. Electromechanical Sigma Delta forcefeed-back and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.
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Key words
Sigma delta modulation, Force feedback, Self-clocking, MEMS, Coriolis force
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