Microtexture And Hardness Of Cvd Deposited Alpha-Al2o3 And Ticxn1-X Coatings

INTERNATIONAL JOURNAL OF REFRACTORY METALS & HARD MATERIALS(2009)

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摘要
The microstructures of chemical vapor deposited coatings on four tool inserts have been comprehensively characterized using electron backscatter diffraction mapping. Nanoindentation was used to measure the hardness of the TiCxN1-x, and alpha-Al2O3 layers in each coating. The TiCxN1-x layers have weak [112] or [101] textures in the growth direction and are highly twinned. In these layers, coherent twins make up 13%-20% of the total grain boundary length. The alumina layers have [10 (1) over bar4] or [0001] textures in the growth direction that are 4.2-8.8 times random. The hardest coatings consist of highly twinned TiCxN1-x layers with weak [112] texture and alpha-Al2O3 with strong [10 (1) over bar4] texture. (C) 2008 Elsevier Ltd. All rights reserved.
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关键词
Coatings,Microstructure,Texture,Hardness
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