High-Precision Free-Form Optics And Application To Soft X-Ray Mirrors

High-end precision optics are generally manufactured through traditional processes, which produce unique shapes and smooth surfaces, and the modern figure correction process. Particularly for soft x-ray regions, the demand for accurate free-form optics with complex and steep shapes has been increasing recently. Wolter mirrors and ring-focusing mirrors are representative of these types of optics, which are expected to be the next-generation devices for soft x-ray microscopy. To fabricate these mirrors with sufficient accuracy to achieve ideal optical performances, both traditional and modern processes must be optimized ad hoc. In this study, we apply the high-precision lens fabrication process to a monolithic Wolter mirror and a ring-focusing mirror. The surface measurement results of the mirrors suggest that it is possible to fabricate single-nanometer accurate soft x-ray mirrors with steep shapes in complex geometries.