Optical Characterization Of Thin Films By Means Of Imaging Spectroscopic Reflectometry

This chapter focuses on optical characterization of thin films by means of non-microscopic imaging spectroscopic reflectometry. This technique is primarily intended for characterization of thin films with an area non-uniformity in their optical properties. An advantage of the technique is the possibility to measure along a relatively large area of the measured films. The motivation for development and exploitation of this technique is also discussed. Essential features and implementation of the technique are given, as well as the basic experimental set-up of imaging spectroscopic reflectometers and the way the experimental data are obtained. The data processing methods are classified based on the purpose of the thin film measurement. Furthermore, this chapter presents examples of results of imaging spectroscopic reflectometry in the field of thin films. At the end of the chapter, potential applications of imaging spectroscopic reflectometry in other tasks are also briefly mentioned.