Electrostatic Microshutter Arrays

2017 19TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS (TRANSDUCERS)(2017)

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摘要
Based on the Microshutter Array (MSA) subsystems developed at NASA Goddard Space Flight Center (GSFC) for the James Webb Space Telescope (JWST), Next Generation Microshutter Array (NGMSA) has been developed to be used as multi-object selectors for future telescopes in space applications. Microshutter arrays function as transmission devices. Selected shutters fully open 90 degrees permitting incoming light to go through, while the rest of shutters remain closed. The programmable microshutters open and close making the device perform as a multi object selector that can be used on space telescopes. Utilizing a multi object selector, the telescope efficiency can be increased to 100 times or more. Like JWST MSAs, NGMSA features torsion hinges, light shields, front and back electrodes for shutter actuation, latch, and closing. The difference is that JWST MSA utilized magnetic actuation while NGMSA uses electrostatic actuation.
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关键词
Micro-optics, Space Telescope, Microshutter, Micro-Electro-Mechanical-System, multi-object spectroscopy
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