130-Mhz Optomechanical Vib' Ting Sensor: Towa' S High Bandwidth / Ultrasensitive Measurements

Lucien Schwab,Pierre-Etienne Allain,Louise Banniard,Nicolas Mauran,Denis Lagrange, Alexandre Fafir,Marc Gely,Maxime Hermouet,Guillaume Jourdan,Sebastien Hentz,Ivan Favero,Bernard Legrand

2019 IEEE 32ND INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)（2019）

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摘要

We show all -optical operation of a VLSI optomechanical micro -resonator designed for high resolution sensing applications. Mechanical resonance frequency is above 100 MHz with Q -factor of 1 000 in air, yielding measurement bandwidth above 100 kHz. We demonstrate low thermomechanical noise floor resolved with exquisite motion detection limit down to 4.10-' 6 m.Hz-'5. This performance, enabled by optomechanical transduction. paves the way for very high-speed and ultra -sensitive sensing applications.

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