High-Level Fault Modeling In Surface-Micromachined Mems
DESIGN, TEST, INTEGRATION, AND PACKAGING OF MEMS/MOEMS, PROCEEDINGS(2000)
Abstract
MEMS structures rendered defective by particles are modeled at the schematic-level using existing models of fault-free MEMS primitives within the nodal simulator NODAS. We have compared the results of schematic-level fault simulations with low-level finite element analysis (FEA) and demonstrated the efficacy of such an approach. Analysis shows that NODAS achieves a 60X speedup over FEA with little accuracy loss in modeling defects caused by particles.
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Key words
mems</title>,high-level,surface-micromachined
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