Features Of Synthesis Of Ti-Si-N Coatings By Condensation Of Vacuum Arc Plasma With A Composite Cathode

The effects of nitrogen pressure on silicon content in Ti-Si-N coatings deposited by the vacuum-arc method using Ti-0.95-Si-0.05 alloy as a consumable cathode material were investigated. It has been found that the silicon content in the coatings under any conditions of deposition is below its concentration in the cathode. In the pressure range from 5.10(-4) to 10(-3) Torr the concentration of silicon in the coating is the lowest (similar to 1.2 wt. %), and hardness of the condensate is the highest (35 GPa). The extremal character of dependences of the silicon concentration and hardness of the coatings on nitrogen pressure is a result of difference in structure-phase composition of the coatings obtained at different pressures.