Experiments Of Diffractive Optical Elements Obtained By Ion Plasma Etching For Aiming And Display Devices

Yanina A. Grad,Polina I. Malinina,Sergey B. Odinokov, Haik R. Sagatelyan,Artem B. Solomashenko

HOLOGRAPHY, DIFFRACTIVE OPTICS, AND APPLICATIONS VII(2017)

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摘要
In this article analysis the possibility of using ion-plasma technology for etching the diffractive optical elements (DOE) directly in the glass, not in a layer of photosensitive material is described. Experimental samples on the light guide substrates for displays and signs-symbolic information indicators are obtained, as well as their basic parameters, such as the depth and shape of the surface topography and the diffraction efficiency are investigated. The experimental results showed the fundamental possibility of manufacturing the DOEs directly on the glass for the display of information systems.
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关键词
diffractive optical element, diffraction grating, display system, holographic inditator, ion plasma etching
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