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Fabrication Of Nano Cluster Assemblies And Characterization In An Uhv Integrated Apparatus

PROCEEDINGS OF THE INTERNATIONAL SYMPOSIUM ON CLUSTER ASSEMBLED MATERIALS(2001)

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摘要
We have constructed a plasma-gas-condensation cluster deposition apparatus, which is a combination of sputtering and condensation in an inert gas atmosphere. This method allows us to produce nano-scale clusters with the average diameter between 2 and 13 nm. In order to detect such large free clusters containing 1 - 10(5) atoms, we have also constructed a time-of-flight mass spectrometer. The mass spectra have been measured with varying the operational parameters of the cluster source. They are shifted to the larger side and the mass distribution becomes broader with increasing the Ar gas pressure, the volume of growth region, and the sputtering power. We have considered the following two models for the cluster growth; 1) a cluster-cluster collision growth and 2) an atomic vapor condensation growth. The cluster growth speed estimated from the former is too slow, while that from the latter is reasonable in comparison with the present experiments.
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关键词
Co-Cr, Ni, Nb, cluster source, sputtering, time-of-flight mass spectrometer, STM
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