New Method For Detecting Moisture Permeation Pass Of Aluminum Oxide Film
IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3(2010)
摘要
We research relations between O/Al ratio and barrier properties of aluminum oxide which has been deposited with varying process voltage controlled reactive sputtering conditions. A new method, using photoluminescence material for detecting defects, is introduced here to evaluate barrier characteristics, especially sizes or density of defects in the barrier layer.
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