Development Of Sputtering Process For Igzo Tft On Large Substrate

Tomiyuki Yukawa,Takaomi Kurata,Makoto Arai,Junya Kiyota, Shigemitsu Sato, Kazutoshi Takahashi,Satoru Ishibashi,Kazuya Saito

IDW'10: PROCEEDINGS OF THE 17TH INTERNATIONAL DISPLAY WORKSHOPS, VOLS 1-3（2010）

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摘要

In recent years, In-Ga-Zn-O (IGZO) has been drawing attention as high mobility material for panel performance improvement. In this report, we discuss uniformity of IGZO deposited by vertical type AC Magnetron Sputtering Equipment that is most widely used in the panel production line of more than Gen. 6 size.

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