Influence Of High-Temperature Annealing On Physical And Mechanical Properties Of Nb-Si-N Coating
PROCEEDINGS OF THE 2017 IEEE 7TH INTERNATIONAL CONFERENCE NANOMATERIALS: APPLICATION & PROPERTIES (NAP)(2017)
摘要
In the work structural changes occurring in the coatings of Nb-Si-N as a result of a change in the stress on the substrate and high temperature annealing in a vacuum and without a vacuum environment were described. The conditions for the transition from the tetragonal to the cubic phase of the niobium nitride as a result of the deviation of the concentration of nitrogen from the stoichiometric equilibrium were revealed. Positive effect of the transition from nanocrystalline to nanocomposite structure as a means of improving the thermal stability of the coating is shown.
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关键词
nanocomposite, Nb-Si-N, stoichiometry, thermal stability, vacuum annealing
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