Ultrahigh-Sensitive and CMOS Compatible ISFET Developed in BEOL of Industrial UTBB FDSOI

Getenet Tesega Ayele,Stephane Monfray,Serge Ecoffey,Frederic Boeuf, Romain Bon,Jean-Pierre Cloarec,Dominique Drouin,Abdelkader Souifi

2018 IEEE SYMPOSIUM ON VLSI TECHNOLOGY（2018）

引用 1|浏览2

关键词

BEOL,ion-sensitive field-effect transistors,ultrahigh-sensitive CMOS compatible ISFET,industrial UTBB FDSOI transistors,Nernst limit,capacitive divider circuit,reference electrode elimination,IoT,integrated pH sensor,Si

AI 理解论文

溯源树

样例

生成溯源树，研究论文发展脉络

Chat Paper

正在生成论文摘要