Study On High-Precision Measurement Of Long Radius Of Curvature

8TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGY: OPTICAL TEST, MEASUREMENT TECHNOLOGY, AND EQUIPMENT(2016)

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摘要
It is hard to get high-precision measurement of the radius of curvature(ROC), because of many factors that affect the measurement accuracy. For the measurement of long radius of curvature, some factors take more important position than others'. So, at first this paper makes some research about which factor is related to the long measurement distance, and also analyse the uncertain of the measurement accuracy. At second this article also study the influence about the support status and the adjust error about the cat's eye and confocal position. At last, a 1055micrometer radius of curvature convex is measured in high-precision laboratory. Experimental results show that the proper steady support (three-point support) can guarantee the high-precision measurement of radius of curvature. Through calibrating the gain of cat's eye and confocalposition, is useful to ensure the precise position in order to increase the measurement accuracy. After finish all the above process, the high-precision long ROC measurement is realized.
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关键词
High-Precision measurement, Long Radius of Curvature, Error Analysis, Cat's eye and Confocal Position
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