The Design Of A New Integrated Gas Sensor Array Based On Fea
TECHNICAL DIGEST OF THE SEVENTH INTERNATIONAL MEETING ON CHEMICAL SENSORS(1998)
Abstract
The temperature distribution of the integrated gas sensor array is discussed Because it is difficult to measure the surface temperature on an integrated gas sensor chip experimentally, FEA software VisiCad is used. The model is derived from the array's exact structure and physical features. We discuss the temperature distribution under steady state of the integrated gas sensor array according to the variances of material properties and the array's structure. At last, we suggest a novel integrated gas sensor array based on the analysis result of FEA.
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