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Multi-beam Inspection (MBI) Development Progress and Applications

Eric Ma,Weiming Ren,Xinan Luo, Shuo Zhao,Xuerang Hu,Xuedong Liu,Chiyan Kuan,Kevin Chou,Martijn Maassen,Weihua Yin, Aiden Chen, Niladri Sen,Martin Ebert,Lei Liu,Fei Wang,Oliver D. Patterson

Metrology, Inspection, and Process Control for Microlithography XXXIV（2020）

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关键词
Multiple beam,MBI,EUV,high throughput,EBI,ebeam inspection
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