Low Temperature Crystallization Technology Of Extremely Thin Tco For Next Generation Panels

Tomiyuki Yukawa, Masaki Takei, Youhei Oono,Atsushi Ota,Makoto Arai,Junya Kiyota,Satoru Ishibashi,Kazuya Saito

IDW/AD '12: PROCEEDINGS OF THE INTERNATIONAL DISPLAY WORKSHOPS, PT 3(2012)

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摘要
Recently, realization of high-performance transparent conductive oxide (TCO) film is required, due to the trend of high-performance small and middle size panel (mainly represented by smart phone and tablet pc). We hereby report the crystallization technology of extremely thin TCO that realized high transmittance and low resistance through low-temperature deposition.
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关键词
ITO, Low temperature deposition, flexible, crystallization
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