Structural and electrical characterization of V 2 O 3 on various substrates: a comparative study

2021 International Semiconductor Conference (CAS)(2021)

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摘要
We investigate the structural morphology and electrical characteristics i.e., metal-insulator transition (MIT) of V2O3 thin films grown by high power impulse magnetron sputtering on Al2O3(c, r, m and a-plane), Si/SiO2 and Si/ SiO2 /TiO2. The MIT characteristics of films were linked to strain induced by substrate, growth t...
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关键词
V2O3,Al2O3,SiO2,TiO2,XRD,HiPIMS
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