Tapping atomic force microscopy imaging at phase resonance

Baishun Sun,Chenchen Xie,Kaige Qu,Liang Cao,Jin Yan,Ying Wang,Liguo Tian,Wenxiao Zhang,Zuobin Wang

2021 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)（2021）

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摘要

Tapping atomic force microscope (TM-AFM) can measure soft samples, which has the advantages of low loss and high resolution, and has been widely used in the characterization of soft micro-nano materials by atomic force microscope (AFM). The phase image in TM-AFM contains sample properties, and it is an important method to characterize the sample by TM-AFM. At present, researchers usually select th...

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关键词

PR-AFM,Phase image,TM-AFM,Soft sample

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