Vertical Si Nano Vacuum Channel Transistors: Building Blocks for Empty State Electronics

2021 34th International Vacuum Nanoelectronics Conference (IVNC)(2021)

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摘要
Vacuum nano channel transistors (VNCT) could potentially have superior performance compared to solid state devices of equivalent channel length owing to ballistic transport of electrons, shorter transit time and higher intrinsic breakdown voltage. Furthermore, they are expected to have very high breakdown voltage. Hence, NVCT have promise for very high Johnson Figure of Merit that is as high as 10...
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关键词
Performance evaluation,Electric potential,Vacuum breakdown,Vacuum technology,Nanoscale devices,Silicon,Ballistic transport
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