Characterization of a Multicusp Ion Source With Two-Grid Extraction System for Studying Extraction and Transport of Ion Beam

A low-energy multipole line cusp ion source with two-grid extraction system has been developed and characterized for studying the role of the charge exchange processes on ion beam extraction, transport, and neutralization. The ion source is operated for extraction of Ar+ ion beam of current 50–240 mA at energies 850–1650 eV. The characterization of the ion beam is carried out at various...