Experimental characterization of Inverse- Designed Vertical Grating Couplers in the O-band

Thomas Van Vaerenbergh,Sean Hooten,Peng Sun,Mudit Jain,Ashkan Seyedi,Zhihong Huang,Marco Fiorentino,Ray Beausoleil

2021 ANNUAL CONFERENCE OF THE IEEE PHOTONICS SOCIETY (IPC)（2021）

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摘要

We perform wafer-level testing of perfectly vertical grating couplers in a c-Si 193nm DUV immersion lithography process. We designed single polarization grating couplers using the adjoint method and experimentally obtain an insertion loss of 1.91dB, a 18.9nm 1dB-bandwidth, and <-10dB in-waveguide reflection.

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关键词

Silicon photonics, Gratings, Photonic integrated circuits

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