Ultra-Wideband Surface Acoustic Wave Filters Based on the Cu/LiNbO 3 /SiO 2 /SiC Structure

Junyao Shen,Sulei Fu,Rongxuan Su,Huiping Xu,Zengtian Lu,Qiaozhen Zhang,Fei Zeng,Cheng Song,Weibiao Wang,Feng Pan

2021 IEEE International Ultrasonics Symposium (IUS)（2021）

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摘要

Wideband filters could contribute to high-throughput wireless communication, and surface acoustic wave (SAW) filters have been widely applied. To obtain ultrawideband SAW filters on SiC wafers, we study the Cu/15°Y-X LiNbO3/SiO2/SiC structure. SAW resonators with various sizes are simulated, fabricated and analyzed. Based on the results of the resonators, we design and fabric...

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关键词

wireless communication,ultra-wideband filter,SiC,LiNbO3,surface acoustic wave

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