Enhanced Sensitivity of Wireless and Passive SAW-Based Strain Sensor With a Differential Structure
IEEE Sensors Journal（2021）
Abstract
A new configuration is proposed to improve the sensitivity and temperature stability of the surface acoustic wave (SAW) strain sensor by using a differential dual-chip structure. Each SAW chip with a one-port resonator pattern is prepared by depositing Al interdigital transducers (IDTS) on Y-cut quartz crystal using the photolithographic technique, and positioned orthogonally in the ceramic packag...
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Key words
Strain,Sensors,Sensitivity,Surface acoustic waves,Wireless communication,Temperature sensors,Temperature measurement
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