Advancements in indirect Time of Flight image sensors in front side illuminated CMOS
ESSCIRC 2021 - IEEE 47th European Solid State Circuits Conference (ESSCIRC)（2021）
Abstract
We will present major advances in Time of Flight (ToF) image sensors for consumer applications. Several innovative elements integrated into a 130nm front side illumination CMOS node reveal superior sensor performance so far only attributed to much more complex backside illumination technologies. The gate controlled pixels comprising deep trenches, buried mirrors and integrated prisms, reveal high ...
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Key words
Image sensors,Phase shifters,Lighting,Transfer functions,Modulation,System-on-chip,Solid state circuits
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