Comparative study of perforated microcantilevers for MEMS applications

In this paper, the circular, square and hexagonal perforations of size 2.5 µm-14.5 µm are considered and compared with a simple rectangular beam. Structural and coupled structural-electrostatic analyses are performed using COMSOL Metaphysics to obtain the results. As the perforation size increases, both resonance frequency and static deflection of the beam increase and the pull-in voltage decrease...