ZnO and Al-doped ZnO Sol-Gel Properties

N. Ben Moussa,M. Lajnef, N. Jebari, F. Mahut,F. Bayle, C. Villebasse, A. Durnez, C. Dupuis, F. Maillard,X. Lafosse,R. Chtourou,E. Herth

2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)（2021）

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摘要

Undoped ZnO and Al-doped ZnO (AZO) were synthesized by sol-gel method and deposited by spin coating. Zinc acetate dehydrate was used as precursor, while ethanolamine and ethanol were used as stabilizer and solvent, respectively, and aluminum nitrate nonahydrate was used as dopant. A comparative study of undoped ZnO and Al-doped ZnO (AZO) deposited by spin-coating at 0.75M was carried out. In this ...

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关键词

Micromechanical devices,Solvents,II-VI semiconductor materials,Ethanol,Packaging,Zinc oxide,Microelectronics

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