Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements

2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP)(2021)

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摘要
We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.
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关键词
Micromechanical devices,Couplings,Measurement uncertainty,Electric variables measurement,Packaging,Mechanical variables measurement,Gyroscopes
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