Analysis of Interface Phenomena for High-Performance Dual-Stacked Oxide Thin-Film Transistors via Equivalent Circuit Modeling

ACS APPLIED MATERIALS & INTERFACES(2021)

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摘要
Oxide thin-film transistors (TFTs) have attracted much attention because they can be applied to flexible and largescaled switching devices. Especially, oxide semiconductors (OSs) have been developed as active layers of TFTs. Among them, indium-gallium-zinc oxide (IGZO) is actively used in the organic light-emitting diode display field. However, despite their superior off-state properties, IGZO TFTs are limited by low field-effect mobility, which critically affects display resolution and power consumption. Herein, we determine new working mechanisms in dual-stacked OS, and based on this, we develop a dual-stacked OS-based TFT with improved performance: high field-effect mobility (similar to 80 cm(2)/V.s), ideal threshold voltage near 0 V, high on-off current ratio (>10(9)), and good stability at bias stress. Induced areas are formed at the interface by the band offset: band offsetinduced area (BOIA) and BOIA-induced area (BIA). They connect the gate bias-induced area (GBIA) and electrode bias-induced area (EBIA), resulting in high current flow. Equivalent circuit modeling and the transmission line method are also introduced for more precise verification. By verifying current change with gate voltage in the single OS layer, the current flowing direction in the dual-stacked OS is calculated and estimated. This is powerful evidence to understand the conduction mechanism in a dual-stacked OS-based TFT, and it will provide new design rules for high-performance OS-based TFTs.
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关键词
dual-stacked oxide semiconductor-based thin-film transistor, high field-effect mobility, conduction mechanism, equivalent circuit modeling, transmission line method
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