Conductance modulation in Al/SiO 2 /n-Si MIS resistive switching structures
2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EuroSOI-ULIS)（2021）
摘要
In this work, we discuss the small-signal conductance modulation in the Metal-Insulator-Semiconductor structure. We present the DC measurement results of Al/SiO2/n++-Si device exhibiting resistive switching phenomena. We show that the application of millisecond voltage pulse train results in conductance modulation. Furthermore, we show conductance modulation effect obtained with other bias schemes...
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关键词
Electric potential,Voltage measurement,Current measurement,Conferences,Modulation,Switches,Silicon
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