Three-Axis Capacitive Sensor Arrays for Local and Global Shear Force Detection
Journal of Microelectromechanical Systems（2021）
关键词
Electrodes,Force,Dielectrics,Capacitance,Sensor arrays,Fabrication,Robot sensing systems,Flexible electronics,capacitive sensing,tactile sensing,shear force,normal force,dielectric,soft lithography,three-axis capacitive sensor
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